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Organic Cleaning Machine - List of Manufacturers, Suppliers, Companies and Products

Organic Cleaning Machine Product List

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Organic cleaning device (explosion-proof specification)

It is a device that promotes drying by placing the substrate after cleaning and coating in a reduced pressure state. Evaluation and testing using experimental equipment are possible.

【Device Configuration】 - Target work basket dimensions: W300×D300×H250mm (made of SUS) - Target barrel basket dimensions: Φ250×D300mm (made of SUS) - Target work weight: Max 10kg - Cleaning process 1) Main cleaning - Vacuum + Ultrasonic (600W 26kHz) 2) Rinse cleaning - Atmospheric pressure + Degassing + Ultrasonic (600W 26kHz) 3) Vapor cleaning - Vacuum vapor 4) Drying - Vacuum self-heating drying - Takt time: Approximately 5 minutes (varies with the amount of work) - Safety measures 1) Motor is explosion-proof and safety-enhanced 2) All automatic valves are air-driven 3) Air purge inside ultrasonic transducer 4) Oil pan leakage sensor - Liquid holding capacity 1) Cleaning liquid (NS-100 Class 2 petroleum) Vacuum and rinse tanks 65L×2 tanks = 130L Distillation unit 90L Buffer and others 60L Total liquid volume 280L 2) Heat transfer oil (Class 4 petroleum) 80L

  • Processing Contract

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Organic cleaning device 'BATCHSPRAY Autoload'

100% focus on BATCHSPRAY technology! Significantly reduces water, exhaust, and chemicals [Wet process equipment for the semiconductor industry] Fully automatic equipment.

This two-chamber system is designed for organic solvent-based chemicals for polymer residue and resist stripping. It includes a patented retainer comb processing system for the mixing of chemicals with high precision in the tank. Automatic management of moisture concentration in organic solvents is possible. 【Features】 ■ Throughput of up to 300 wph ■ Two process chambers ■ Uniformity with less than 1% variation ■ Installation area of less than 12 m² ■ Chemical recirculation through a tank system ■ Process execution possible with SiC/GaN *For more details, please refer to the PDF document or feel free to contact us.

  • Other semiconductor manufacturing equipment

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Organic cleaning device "BATCHSPRAY Solvent"

100% focus on BATCHSPRAY technology! Significantly reduces water, exhaust, and chemicals [Wet process equipment for the semiconductor industry] Semi-automatic equipment.

Our semi-automatic device stands out for its high performance, efficient chemical recirculation, minimized installation area, and optimized space efficiency. 【Features】 ■ Throughput of up to 150 wph ■ Installation area of less than 2 m² ■ Chemical recirculation via tank system ■ Process executable with SiC/GaN ■ Usable with 25 or 50 wafer chambers ■ Extractable process chamber ■ ATEX safety standards *For more details, please refer to the PDF document or feel free to contact us.

  • Other semiconductor manufacturing equipment

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